Analysis of the silicon technology roadmap - How far can CMOS go?

Scaling of dimensions allows new functions, continuous increase in speed, a nd larger and larger density, eventually leading to entire system-on-chip i ntegration. But for how long can this scaling continue? In the first part o f the paper we will analyse the roadblocks that CMOS will meet on its road to deca-nanometer dimensions. Next, we will analyse available and prospecti ve solutions that may help in circumventing or even radically getting-over the roadblocks. Finally, we will analyse some breakthrough solutions potent ially capable of giving CMOS the necessary power for continuing the road be yond roadmap. (C) 2000 Academie des sciences/Editions scientifiques et medi cales Elsevier SAS.