In-situ atomic force microscopy of silicon(100) in aqueous potassium hydroxide

Growth dynamics of pyramid-shaped features that emerge during etching of si licon(100) surfaces in 2 M aqueous potassium hydroxide solutions have been investigated using in-situ atomic force microscopy. Micropyramids were foun d to grow continuously from a scale-shaped structure that is present on the surface during etching. In addition, two characteristic removal mechanisms of fully developed pyramids could be identified. It is suggested that thes e etching mechanisms are unique to pyramids and not comparable to the etchi ng properties of single crystal surfaces. (C) 2000 Elsevier Science Ltd. Al l rights reserved.