Composition characterization of Pb(Zr,Ti)O-3 (PZT) thin films prepared by pulsed laser deposition: Ambient gas and substrate position effect

Spatial distribution of the cations in pulsed laser deposition of Pb(Zr,Ti) O-3 thin films under ambient oxygen and argon was characterized by using th e inductively-coupled plasma method. The results show that Zr and Ti have s imilar spatial distribution under both oxygen and argon ambient, while the spatial distribution of Pb under the two ambient gases is very different. T he Pb/(Zr+Ti) ratio under the two ambient gases decreases with distance fro m the target. The results observed here are interpreted by identifying the mechanism of ablation and evaporation in interaction between laser beam and target.