Optimum heat treatment condition for PZT thin films prepared by sol-gel

The effects of pyrolysis and annealing conditions on the orientation of PZT thin films prepared by Sol-Gel process have been investigated. The influen ce of the interface behaves between Ti and Pt Formed at different heat trea tment conditions on orientation of final PZT thin films was emphasized in t his paper. The relationship between thermal treatment and orientation in PZ T thin films fabricated by the technique was set up, and the optimum therma l process was determined. PZT films on the (111)Pt/Ti/SiO2/Si using such pr ocess exhibited good ferroelectric properties.