Growth and micro-Raman study of RF magnetron sputter deposited PbTiO3 thinfilms

PbTiO3 thin films have been prepared on Si <100> and MgO <100> substrates u sing sequential RF magnetron sputtering of Pb and Ti targets. As deposited films were post annealed in the presence of oxygen to get PbTiO3 phase. Fil ms were characterized using Xrd, SEM, XPS and temperature dependent Micro-R aman studies. Micro-Raman spectra were obtained from 75K to 550K. We have i nvestigated the low temperature phase transitions and noticed that there is a possible evidence for the structural phase transitions in our low temper ature Raman data of the polycrystalline PT films.