The application of ferroelectric materials in micro-electro-mechanic systems (MEMS)

In comparison to other commonly used MEMS materials Ferroelectric materials take the significant advantages of high signal-to-noise ratio, low power d issipation and great force generation, so they are the promising candidates for fabricating sensor and actuator in MEMS. This paper will mainly discus s two kinds of applications of ferroelectrics (FEs) in MEMS, one is the sen sor of infrared detector which is based on pyroelectric effect of FEs thin film; the other is actuators which utilize piezoelectric effect, such as ac oustic and optical devices.