Piezoelectric ultrasonic motor and fine positioner with two freedoms

A rod-type piezoelectric ultrasonic motor using based bending vibration mod e with small size of 15 mm in diameter and 25 mm in length, improved constr uction and a fine positioner with two freedoms driven directly by a couple of the piezoelectric ultrasonic motors were developed. High displacement re solution and large driving force of the positioner can be obtained utilizin g the characteristics of ultrasonic motors with large torque at low speed a nd high angle resolution. Controlled by a microprocessor, the positioner ca n move in stepping mode responding to a pulse signal. A prototype with disp lacement resolution of 12 nm and driving force of 1 kgf has been successful ly applied to precision regulating mechanism for laser resonant cavity.