Photomodulated reflectance as a valuable nondestructive process tool for VCSELs

Authors
Sale, TE Hosea, TJC Thomas, PJS
Citation
Te. Sale et al., Photomodulated reflectance as a valuable nondestructive process tool for VCSELs, IEEE PHOTON, 12(10), 2000, pp. 1328-1330
Citations number
10
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science
Journal title
IEEE PHOTONICS TECHNOLOGY LETTERS
ISSN journal
10411135 → ACNP
Volume
12
Issue
10
Year of publication
2000
Pages
1328 - 1330
Database
ISI
SICI code
1041-1135(200010)12:10<1328:PRAAVN>2.0.ZU;2-L
Abstract
Optical reflectivity spectra are useful in assessing the structure of verti cal-cavity surface-emitting lasers (VCSELs) but show little of the nature o f the active quantum well (QW), Here we use photomodulated reflectance to i dentify a region of an epitaxial wafer with optimal cavity-QW alignment. Al InGaP-AlGaAs visible VCSEL devices fabricated from this region lased well, compared with devices from a nearby control piece of the wafer which failed to lase at all.