Gj. Norga et al., The effect of Pb stiochiometry on switching behavior of Pt/lead zirconate titanate/Pt ferroelectric capacitors, J MATER RES, 15(11), 2000, pp. 2309-2313
A promising approach to control Pb stoichiometry during crystallization of
sol-gel-derived lead zirconate titanate (PZT) layers is presented. Pyrolyze
d layers were encapsulated in a quartz ampoule containing PbZrO3 powder and
crystallized in a lamp furnace, For moderate heating rates, the PbO ambien
t created by the powder resulted in a pronounced sharpening of the preferen
tial (111) texture, while the remanent polarisation P-r increased by 50% co
mpared to nonencapsulated samples. A significant reduction of the coercive
field was seen for layers crystallized under PbO ambient, reflected in a lo
wering of the switching voltage by 0.5 V compared to standard hotplate crys
tallized films. The results highlighted the key role of Pb stoichiometry co
ntrol for further lowering the switching voltage of PZT films.