Surface stress model for intrinsic stresses in thin films

A simple model was presented for intrinsic stress generation in thin films resulting from surface stress effects. This mechanism can explain the origi n of compressive stresses often observed during island growth prior to coal escence, as well as intrinsic compressive stresses reported for certain con tinuous, fully grown films. In some cases, surface stress effects may contr ibute to a sudden change in the intrinsic stress during island coalescence.