Application to decontamination is proposed of microwave discharge plasma in
carbon tetrafluoride and oxygen mixture at atmospheric pressure. Prelimina
ry cold experiments were conducted using cobalt oxide deposited on stainles
s steel plate. Fluorine atoms proved to be generated in high concentration
in the plasma, which fluorinated the deposited metal oxide into volatile ga
seous form. Upon plasma irradiation during about 200s, the cobalt oxide dep
osit was removed to 100% from plate surface. Thermodynamic equilibrium calc
ulations on CF4-O-2 systems containing cobalt served to elucidate the mecha
nism of metal oxide removal by microwave discharge plasma, and similar calc
ulations on systems containing actinides (U, Pu etc.) and lanthanides (La,
Gd etc.) indicated that the process should be applicable also to the remova
l of these radioactive elements. It is concluded from the experimental and
calculated results that decontamination is basically feasible with the prop
osed method of using microwave discharge plasma in a CF4-O-2 system at atmo
spheric pressure.