Authors
Citation
E. Zolotoyabko et D. Parnis, HIGH-RESOLUTION X-RAY-DIFFRACTION FROM IMPERFECT HETEROSTRUCTURES, Nuovo cimento della Societa italiana di fisica. D, Condensed matter,atomic, molecular and chemical physics, biophysics, 19(2-4), 1997, pp. 385-392
Citations number
15
Categorie Soggetti
Physics
Journal title
ISSN journal
03926737
Volume
19
Issue
2-4
Year of publication
1997
Pages
385 - 392
Database
ISI
SICI code
0392-6737(1997)19:2-4<385:HXFIH>2.0.ZU;2-R
Abstract
A new simulation procedure allowing to calculate diffraction spectra f
rom heterostructures is developed using direct summation of waves scat
tered by atomic planes. Analytical expressions were obtained in the im
portant case of imperfect heterostructures with local fluctuations of
the lattice parameters due to inhomogeneous distribution of point and
extended defects. This approach is applied in order to fit high-resolu
tion diffraction spectra taken from SiGe/Si heterostructures grown und
er different conditions.