X-RAY REFLECTIVITY RECIPROCAL SPACE MAPPING OF STRAINED SIGE SI SUPERLATTICES/

Small-angle diffuse X-ray reflection from a SiGe/Si multilayer has bee n studied theoretically and experimentally. The scattering process has been described by means of the DWBA method. For the description of th e rough interfaces, the results of the Markov chain theory have been u sed. It has been demonstrated that the distribution of the diffusely s cattered intensity in reciprocal plane gives some information on both the in-plane and inter-plane correlation properties of the multilayer roughness. The sample of SiGe/Si multilayer grown on a slightly miscut substrate has been investigated. The most suitable structure model de scribing the form of the interfaces is a combination of the two-level model with the staircase model.