The effects of Si incorporation on the microstructure and nanomechanical properties of DLC thin films

A small amount of silicon incorporation into diamond-like carbon (DLC) film s prepared by plasma-enhanced chemical vapour deposition (PECVD) onto Al2O3 :TiC substrates was studied by a combination of surface analysis and nanom echanical measurement techniques, namely XPS, Raman spectroscopy, nanoinden tation and nanoscratch methods. Addition of silicon to the DLC films leads to an increase in the fraction of sp(3), as deduced from XPS analysis, and a decrease in the Raman band intensity ratio 1(D)/1(G). Although the coated substrates exhibit better scratch resistance and lubricity, the films as d eposited are softer than the Al2O3:TiC substrates. Upon silicon incorporati on, the mechanical and tribological properties are degraded. Wear protectio n of the Al2O3:TiC substrate by DLC coating corresponds to the competition between the reduction in friction coefficient and the softening of the film s. It is suggested that, for such a PECVD process, the degradation of the m echanical properties is caused by the increased hydrogen content in the dep osits when silicon is incorporated, as is shown by the increased Raman spec tral background slope. These tendencies are attributable to the development of polymer-like chains, which can weaken the inter-molecular structure of the films.