To investigate alternative conditioning concepts for future fusion dev
ices with permanent magnetic fields, plasmas produced by the coupling
of ICRF power to He and gas mixtures of helium + silane, have been ana
lyzed in the presence of a 2.25 T toroidal magnetic field at TEXTOR-94
. Their qualification for wall conditioning has been investigated for
different He-pressures, P-He (1.X 10(-3) < P-He (Pal < 1 X 10(-1)) and
ICRF power, P-ICRF (100 <P-ICRF (kW)< 800). Electron densities n(e) a
veraged along different radial lines of sight across the vacuum vessel
from the top to the bottom have been obtained in the range 5 X 10(10)
< n(e) (cm(-3))< 3 X 10(12). To study quantitatively the efficiency o
f hydrogen desorption from the first wall at different ICRF plasma con
ditions in a reproducible way, the first wall was presaturated by RG-g
low discharges in H-2. The amount and the evolution of the H-2 desorpt
ion from rf discharge to rf discharge was determined by ion gauge meas
urements combined with mass spectrometry. To demonstrate the capabilit
y of the new method for plasma assisted thin film deposition, differen
t amounts of silane (< 50%) were added to the He gas. During the ICRF
pulses, the silane molecules were dissociated in the plasma and the Si
atoms stick to the wall. A good balance of the amount of Si disappear
ing from the gas phase and that measured by post mortem surface analys
es of collector probes at the wail position was found.