INVESTIGATION OF BERYLLIUM SELF-SPUTTERING

The angular dependence of the beryllium self-sputtering yield (Y-S) ha s been investigated. The self-sputtering yield was measured as a funct ion of the angle of ion incidence in the angle range of 0-85 degrees. The measured data agree with those of the computer simulation at the a ngles of incidence: 0 degrees, 30 degrees, 45 degrees and 85 degrees. The maximum Value of both the experimental and calculated beryllium se lf-sputtering yield occurs at the same angle of incidence -75 degrees, but the experimental yield is reduced by a factor of 1.75 compared to the calculated value. The self-sputtering yield of beryllium is deter mined by the surface relief of microscopic scale created by ion bombar dment.