SPECTROSCOPIC MEASUREMENT OF KINETIC-ENERGY OF SPUTTERED BORON IN ELECTRON-CYCLOTRON-RESONANCE PLASMA

A new diagnostic method for measurement of the kinetic energy of sputt ered boron in plasma using spectroscopic technique has been developed. Boron is sputtered by plasma ions produced by electron cyclotron reso nance discharge, Line emissions from the borons are measured in direct ions both parallel and perpendicular to the boron moving axis using a compact monochromator. Observed emission profiles an analyzed by means of non-linear least square fitting and E-peak, at which the resultant profile h(M)(E-z) has a peak value, is inferred, where surface bindin g energy U-s, is nearly equal to 4 x E-peak. The values E-peak of the boron sputtered by helium, neon, and argon ions with energy of 2 keV a re 1.5-2.0 eV, 0.95-1.3 eV and 1.5-1.7 eV, respectively.