High Tg polyarylate thin films for photonic device applications

Polyarylates (PARs) with high glass transition temperature (Tg) are used fo r photonic device applications. Optical properties are investigated, and it indicates that the PARs show high thermal stability as well as high optica l transparency. Electron-beam lithography can be performed using the PAR th in films, and high resolution surface relief gratings are fabricated by dir ect electron-beam writing technique together with thermal development.