Electroluminescence (EL) is the most significant measure for light-emitting
diodes since it probes the most relevant properties of the fully processed
device during operation. In addition to the information gained by conventi
onal spectrally resolved EL, scanning micro-EL provides spatially resolved
information. The devices under investigation are InGaN/GaN-LEDs with single
peak band-band emission at about 400 nm grown by MOVPE on sapphire substra
tes
The mu -EL-characterization is performed as a function of injection current
densities and the emission is investigated from the epitaxial layer as wel
l as from substrate side. Spatially resolved wavelength images reveal emiss
ion peaks between 406 nm and 417 nm corresponding either to In fluctuations
of 1 %-1.5 % or local fluctuations of piezo electric fields. Beside the in
formation on the emission wavelength fluctuations mu -EL is used to determi
ne the temperature distribution in the LEDs and to investigate transparent
contacts.