High-sensitivity visible-blind AlGaN photodiodes and photodiode arrays

Authors
Brown, JD Matthews, J Harney, S Boney, J Schetzina, JF Benson, JD Dang, KV Nohava, T Yang, W Krishnankutty, S
Citation
Jd. Brown et al., High-sensitivity visible-blind AlGaN photodiodes and photodiode arrays, MRS I J N S, 5, 2000, pp. NIL_34-NIL_39
Citations number
9
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science
Journal title
MRS INTERNET JOURNAL OF NITRIDE SEMICONDUCTOR RESEARCH
ISSN journal
10925783 → ACNP
Volume
5
Year of publication
2000
Supplement
1
Pages
NIL_34 - NIL_39
Database
ISI
SICI code
1092-5783(2000)5:<NIL_34:HVAPAP>2.0.ZU;2-H
Abstract
Visible-blind UV cameras based on a 32 x 32 array of backside-illuminated G aN/AlGaN p-i-n photodiodes have been successfully demonstrated. The photodi ode arrays were hybridized to silicon readout integrated circuits (ROICs) u sing In bump bonds. Output from the UV cameras were recorded at room temper ature at frame rates of 30-240 Hz. These new visible-blind digital cameras are sensitive to radiation from 285-365 nm in the UV spectral region.