Growth kinetics of GaN thin films grown by OMVPE using single source precursors

We report the growth kinetics of GaN thin films using the single source pre cursor bisazido dimethylaminopropyl gallium (BAZIGA) in a cold wail reactor . Transparent, smooth, epitaxial (FWHM of the alpha -GaN 0002 rocking curve = 129.6 arcsec) and stoichiometric GaN films were grown on c-plane Al2O3 s ubstrates in the temperature range of 870 - 1320K and high growth rates wer e obtained (up to 4000 nm/hr). Film growth was studied as a function of sub strate temperature as well as reactor pressure. Although high quality films were obtained without using any additional source of nitrogen such as ammo nia, we have investigated the effect of ammonia on the growth and propertie s of the resulting films. The films obtained were characterized by XRD, RES , XPS. AES, AFM, SEM and the room temperature PL spectroscopy of GaN films grown exhibited the correct near band edge luminescence at 3.45 eV.