Si-doping of cubic GaN epilayers grown by an rf plasma-assisted molecular b
eam epitaxy on semi-insulating GaAs (001) substrates is investigated by sec
ondary ion mass spectroscopy (SIMS), photoluminescence (PL) and by Hall-eff
ect measurements. SIMS measurements show a homogeneous incorporation of Si
in cubic GaN epilayers up to concentrations of 5*10(19) cm(-3). PL shows a
clear shift of the donor-acceptor emission to higher energies with increasi
ng Si-doping. Above a Si-flux of 1*10(11) cm(-2) s(-1) the near band edge l
ines merge to one broad band due to band gap renormalization and conduction
band filling effects. The influence of the high dislocation density (appro
ximate to 10(11) cm(-2)) in c-GaN:Si on the electrical properties is reflec
ted in the dependence of the electron mobility on the free carrier concentr
ation. We find that dislocations in cubic GaN act as acceptors and are elec
trically active.