Jz. Li et al., Correlation between sheet carrier density-mobility product and persistent photoconductivity in AlGaN/GaN modulation doped heterostructures, MRS I J N S, 5, 2000, pp. NIL_538-NIL_543
High quality Al0.25Ga0.75N/GaN modulation-doped heterojunction field-effect
transistor (MOD-HFET) structures grown on sapphire substrates with high sh
eet carrier density and mobility products (n(s)mu > 10(16)/Vs room temperat
ure) have been grown by metal organic chemical vapor deposition (MOCVD). Th
e optimized structures were achieved by varying structural parameters, incl
uding the AlGaN spacer layer thickness, the Si-doped AlGaN barrier layer th
ickness, the Si-doping concentration, and the growth pressure. In these str
uctures, the persistent photoconductivity (PPC) effect associated with the
two-dimensional electron gas (2DEG) system was invariantly observed. As con
sequence, the characteristic parameters of the 2DEG were sensitive to light
and the sensitivity was associated with permanent photoinduced increases i
n the 2DEG carrier mobility (mu) and sheet carrier density (n(s)). However,
we observed that the magnitude of the PPC and hence the photoinduced insta
bility associated with these heterostructures were a strong function of onl
y one parameter, the product of n(s) and mu, which is the most important pa
rameter for the HFET device design. For a Fixed excitation photon dose, the
ratio of the low temperature PPC to the dark conductivity level was observ
ed to decrease from 200% to 3% as the n(s)mu (300 K) product was increased
from 0.048 x 10(16)/Vs to 1.4 x 10(16)/Vs. Based on our studies, we suggest
that the magnitude of the low temperature PPC can be used as a sensitive p
robe for monitoring the electronic quality of the AlGaN/GaN HFET structures
.