M. Schubert et al., Phonons and free carriers in a strained hexagonal GaN-AlN superlattice measured by infrared ellipsometry and Raman spectroscopy, MRS I J N S, 5, 2000, pp. NIL_610-NIL_615
Phonon and free-carrier effects in a strained hexagonal ( alpha) {GaN}(l)-{
AlN}(m) superlattice (SL) heterostructure (l = 8 nm, m = 3 nm) are studied
by infrared spectroscopic ellipsometry (IRSE) and micro (mu)-Raman scatteri
ng. Growth of the heterostructures was performed by metal-organic vapor pha
se epitaxy (MOVPE) on (0001) sapphire. An unstrained 1 mum-thick alpha -GaN
layer was deposited prior to the SL. SL phonon modes are identified combin
ing results from both IRSE and mu -Raman techniques. The shift of the GaN-s
ublayer phonon modes is used to estimate an average compressive SL stress o
f sigma (xx) similar to - 4.3 GPa. The IRSE data reveal a free-carrier conc
entration of n(e) similar to 5x10(18) cm(-3) within the undoped SL GaN-subl
ayers. According to the vertical carrier confinement, the free-carrier mobi
lity is anisotropic, and the lateral mobility (mu (perpendicular to) simila
r to 400 cm(2)/Vs, polarization E perpendicular toc-axis) exceeds the verti
cal mobility (mu similar to 24 cm(2)/Vs, E parallel toc) by one order of ma
gnitude.