HIGH T-C GDBA2CU3O7-DELTA SUPERCONDUCTING THIN-FILM BOLOMETERS

Single element and 2x2 array bolometers have been prepared with GdBa2C u3O7-delta superconducting thin films on Zr(Y)O-2 single crystal subst rates. The bolometers are meander type with line width and distance of 10 mu m, the effective area is phi 0.8mm or 0.8x0.8mm(2). The resista nce transition temperature of the films is higher than 90K and the tra nsition width is less than 2K, after patterning by photolithography an d wet etching. The substrate was ground and polished to about 0.05mm i n thickness for reducing heat capacitance and increasing the responsiv ity. The performances of the bolometers are NEP of 3.8x10(-12)WHz(-1/2 ). normalized detectivity D of 1.7x10(10)cmHz(1/2)/W and responsivity Rv of 3300V/W. These properties did not degrade after the bolometers were stored for 20 months under more than 40 warm-cold cycles. The pro perties of each element in the 2x2 array are comparable within 8%.