K. Bluthner et al., SINGLE-ELECTRON TRANSISTORS BASED ON AL ALOX/AL AND NB/ALOX/NB TUNNEL-JUNCTIONS/, IEEE transactions on applied superconductivity, 7(2), 1997, pp. 3099-3102
As an alternative to the shadow evaporation method for the preparation
of ultrasmall tunnel junctions we have established the so-called self
-aligned in-line technique. It was applied to the fabrication of commo
n Al/AlOx/Al-type and, for the first time, Nb/AlOx/Nb-based single-ele
ctron transistors. The characterization of the samples at temperatures
in the range of a few hundred millikelvins reveals charging effects (
Coulomb blockade and gate modulation) of the quasiparticle current.