GROWTH OF NDBA2CU3O7-DELTA THIN-FILMS AND FABRICATION OF DIRECTLY COUPLED DC SQUID MAGNETOMETER

Thin films of NdBa2Cu3O7-delta were fabricated by off-axis rf sputteri ng and pulsed laser deposition (PLD) methods. The deposition parameter s for thin film fabrication, such as gas pressure, substrate temperatu re, annealing conditions, and rf power or laser energy density were st udied. Highly c-axis oriented thin films with the maximum T-c (R=0) of 87 K were obtained at the optimum deposition conditions of rf sputter ing. It, however, was more difficult to optimize the PLD conditions. T he directly coupled de SQUIDs were fabricated on SrTiO3 bi-crystal sub strates using single layer NdBa2Cu3O7-delta film grown by PLD method.