Lecture notes on radio-frequency discharges, dc potentials, ion and electron energy distributions

Authors
Citation
Wj. Goedheer, Lecture notes on radio-frequency discharges, dc potentials, ion and electron energy distributions, PLASMA SOUR, 9(4), 2000, pp. 507-516
Citations number
16
Categorie Soggetti
Physics
Journal title
PLASMA SOURCES SCIENCE & TECHNOLOGY
ISSN journal
09630252 → ACNP
Volume
9
Issue
4
Year of publication
2000
Pages
507 - 516
Database
ISI
SICI code
0963-0252(200011)9:4<507:LNORDD>2.0.ZU;2-Y
Abstract
These notes are meant as a first introduction into the physics of capacitiv ely coupled radio-frequency discharges for people that are about to start o r have just started research involving gas discharges. The scope is limited to the basic electrical characteristics and to the behaviour of the positi ve ions and electrons in the discharge.