IMPROVED 1 V AND 10 V JOSEPHSON VOLTAGE STANDARD ARRAYS

1 V and 10 V Josephson voltage standard arrays are fabricated on the b asis of an improved design, using a modified technology. The Nb/Al2O3N b trilayer is deposited directly on the Si wafer. The edges of the bas e electrodes are insulated by an anodization process. The maximum step voltage increases linearly with the external microwave voltage. Switc hing between different voltage levels is possible by simple switching of the de voltage bias. A laboratory-made, oversized circular waveguid e reduces the attenuation of the experimental set-up.