Low optical loss planar waveguides prepared in an organic-inorganic hybridsystem

HfO2-(3-glycidoxipropil)trimethoxisilane (GPTS) planar waveguides were prep ared by a sol-gel route. A stable sol of Hafnia nanocrystals was prepared a nd characterized by photon correlation spectroscopy and high resolution tra nsmission electron microscopy. The suspension was incorporated in GPTS host and the resulting sol was deposited on borosilicate substrates by the spin coating technique. Optical properties such as refractive index, thickness, number of propagating modes, and attenuation coefficient were measured at 632.8, 543.5, and 1550 nm by the prism coupling technique as a function of the HfO2 content. (C) 2000 American Institute of Physics. [S0003-6951(00)03 348-9].