A method is introduced for measuring the tunneling of electrons between a s
pecially fabricated scanning probe microscope tip and a surface. The techni
que is based upon electrostatic force detection of charge as it is transfer
red to and from a small (10(-17) F) electrically isolated metallic dot on t
he scanning probe tip. The methods for dot fabrication, charging, and disch
arging are described and electron tunneling to a sample surface is demonstr
ated. (C) 2000 American Institute of Physics. [S0003-6951(00)05149-4].