DIRECT ATOMIC FLUX MEASUREMENT OF ELECTRON-BEAM EVAPORATED YTTRIUM WITH A DIODE-LASER-BASED ATOMIC-ABSORPTION MONITOR AT 668 NM

Authors
WANG WZ HAMMOND RH FEJER MM ARNASON S BEASLEY MR BORTZ ML DAY T
Citation
Wz. Wang et al., DIRECT ATOMIC FLUX MEASUREMENT OF ELECTRON-BEAM EVAPORATED YTTRIUM WITH A DIODE-LASER-BASED ATOMIC-ABSORPTION MONITOR AT 668 NM, Applied physics letters, 71(1), 1997, pp. 31-33
Citations number
7
Categorie Soggetti
Physics, Applied
Journal title
Applied physics letters → ACNP
ISSN journal
00036951
Volume
71
Issue
1
Year of publication
1997
Pages
31 - 33
Database
ISI
SICI code
0003-6951(1997)71:1<31:DAFMOE>2.0.ZU;2-J
Abstract
A direct measurement of atomic flux in e-beam evaporated yttrium has b een demonstrated with a diode-laser-based atomic absorption (AA) monit or at 668 nm. Atomic number density and velocity were measured through absorption and Doppler shift measurements to provide the atomic flux. The AA-based deposition rates were compared with independent quartz c rystal monitors showing agreement between the two methods. (C) 1997 Am erican Institute of Physics.