AN X-RAY SPECTROMICROSCOPIC STUDY OF THE LOCAL-STRUCTURE OF PATTERNEDTITANIUM SILICIDE

Results from a spectromicroscopic study of the formation of TiSi2 in p atterned structures are reported. An x-ray spectromicroscope was used to acquire spectra and images with photoabsorption signals using synch rotron radiation. A patterned TiSi2 sample with feature sizes ranging from 100 mu m to 0.1 mu m was studied. The silicidation reactions were carried out in ultrahigh vacuum using rapid thermal processing. Later al variations in the local chemistry of the titanium silicide could be directly imaged and are attributed to the formation of the C54 phase in large areas and the C49 phase at feature edges and in narrow featur es. (C) 1997 American Institute of Physics.