Magnetic-field-assisted anodization of GaAs substrates

The effect of a magnetic field on structural properties during anodization of GaAs substrates was investigated to gain insight into formation of order ed hole arrays on GaAs surfaces. Lorentz force induced by a magnetic field considerably affected formation of honeycomb hole arrays. In anodization wi th a magnetic field parallel to the surface, regularity of honeycomb holes was increased by increasing the magnetic field. The size of honeycomb holes also increased with increased magnetic field. The cross-sectional shape of holes anodized with a magnetic field parallel to the surface was asymmetri cal, and the holes were shallow. For the sample anodized with a magnetic fi eld perpendicular to the surface, the shape of holes was symmetric, and the holes were deep. (C) 2000 The Electrochemical Society. S1099-0062(00)07-06 3-2. All rights reserved.