The nearelectrode electron beams density in the capacitive radiofrequency discharge plasma

Authors
Kovalevsky, VL Savinov, VP Singaevsky, IF
Citation
Vl. Kovalevsky et al., The nearelectrode electron beams density in the capacitive radiofrequency discharge plasma, IAN FIZ, 64(7), 2000, pp. 1361-1363
Citations number
9
Categorie Soggetti
Physics
Journal title
IZVESTIYA AKADEMII NAUK SERIYA FIZICHESKAYA
ISSN journal
03676765 → ACNP
Volume
64
Issue
7
Year of publication
2000
Pages
1361 - 1363
Database
ISI
SICI code
0367-6765(200007)64:7<1361:TNEBDI>2.0.ZU;2-V