This paper discusses questions of the fabrication of dielectric coatings on
nonlinear optical BBO crystals. The effect of sputtering methods and subse
quent gas and heat treatment on the mechanical and radiation strength of Si
O2+/-delta-based dielectric coatings is studied. The dependence of the lase
r-damage thresholds of the coatings on their nonstoichiometry with respect
to oxygen is analyzed. (C) 2000 The Optical Society of America. [S1070-9762
(00)00611-4].