Superconformal electrodeposition of copper in 500 nm deep trenches ranging
from 500 to 90 nm in width has been demonstrated using an acid cupric sulfa
te electrolyte containing chloride (Cl). polyethylene glycol (PEG), and 3-m
ercapto-1-propanesulfonate (MPSA). In contrast, similar experiments using e
ither an additive-free electrolyte, or an electrolyte containing the binary
combinations Cl-PEG. Cl-MPSA. or simply benzotriazole (BTAH), resulted in
the formation of a continuous void within the center of the trench. Void fo
rmation in the latter electrolytes is shown to be reduced through the geome
trical leveling effect associated with conformal deposition in trenches or
vias with sloping sidewalls. The slanted sidewalls also counterbalance the
influence of the differential cupric ion concentration that develops within
the trenches. Examination of the i-E deposition characteristics of the ele
ctrolytes reveals a hysteretic response associated with the Cl-PEG-MPSA ele
ctrolyte that can be usefully employed to monitor and explore additive effi
cacy and consumption. Likewise, resistivity measurements performed on corre
sponding blanket films can be used to quantify the extent of additive incor
poration and its influence on microstructural evolution. The films deposite
d from the Cl-PEG-MPSA electrolyte exhibit spontaneous recrystallization at
room temperature that results in a 23% drop in resistivity with in a few h
ours of deposition. (C) 2000 The Electrochemical Society. S0013-4651(00)04-
078-7. All rights reserved.