A study on the modification of the physicochemical properties of the carbon
-nitrogen compounds when submitted to a thermal annealing process is report
ed. Original films were obtained by ArF laser ablation using organic and in
organic targets in a reactive atmosphere of ammonia or in vacuum conditions
. The evolution of the film chemical composition and bonding configuration
was followed by controlled thermal effusion, Fourier-transform infrared and
energy dispersive x-ray spectroscopies. The thermal energy supplied to the
material during the postdeposition annealing of the CN, films promotes the
formation of single CN bonds although the film nitrogen concentration decr
eases by the effusion of hydrogen cyanide, cyanogen, and CN radicals. Addit
ional experiments at different substrate processing temperatures were carri
ed out in order to analyze the role of the temperature on the film properti
es during the film processing and during postdeposition annealing. (C) 2000
American Vacuum Society. [S0734-2101(00)02506-9].