Sputter-induced cone and filament formation on InP and AFM tip shape determination

The structures formed on the InP(100) surface by sputtering with fluences o f the order of 10(21) ions m(-2) of 4-8 keV argon are analysed by scanning electron microscopy, atomic force microscopy (AFM) and Auger electron spect roscopy, Well-defined cones are formed if small traces of polymeric coating s are deposited on the surface. However, for clean surfaces at room tempera ture, the sputtered surface may be cone-free. Surfaces that are sputtered a t above ambient temperature exhibit a dense filamentary growth, the heights of which increase in magnitude as the temperature rises. For the condition s used in this work, filaments 200 nm high occur at 260 degreesC. The mecha nism for this growth is thought to arise from stress through capacitative e ffects arising from charging of an indium cap at the top of the filament by the ion beam, At elevated temperatures, diffusive effects occur to reduce this strain by causing elongation of the filament. Samples may be heated by the power deposited from the ion beam so that filaments occur on samples t hat would otherwise be at room temperature. By heating the InP in the tempe rature range 100-180 degreesC, filaments 30-80 nm high may be grown, which are excellent for imaging the structure at the ends of AFM tips. New softwa re, which averages the images of several individual filaments, allows the t ip structure to be monitored, wear effects to be diagnosed and worn tips to be rejected. The samples can be used routinely, in-between other samples, to allow diagnosis directly without the need to use other forms of microsco py. (C) Crown Copyright 2000. Reproduced with the permission of the Control ler of HMSO. Published by John Wiley & Sons, Ltd.