OPTICAL TIN FILMS BY FILTERED ARC EVAPORATION

A filtered are evaporation system was used in the deposition of microd roplet-free TiN films. It was created within a conventional bell jar v acuum system using a magnetic-field steered are and a plasma duct form ed from a free standing and isolated high current solenoid. The films were reactively deposited onto glass substrates by are evaporation of titanium in a nitrogen/argon atmosphere. The TiN films examined by sca nning electron microscopy, showed a fine structure, with a small grain size of 20-30 nm. The optical properties for thin films showed good s electivity in their spectral reflectance. X-ray diffraction showed a s trong alignment of the [111] direction parallel to the film surface. ( C) 1997 Elsevier Science S.A.