The microstructure of NdNiO3 thin films deposited on Si (100) was been inve
stigated by high resolution electron microscopy. Deposition at 250 degreesC
and 600 degreesC and several annealing at high temperature under oxygen pr
essure were performed. Depending on the deposition temperature and annealin
g conditions, different texture and microstructure were observed. Relations
hips between microstructure and transport properties are discussed. The dif
ferences of grain boundaries are suggested to be responsible for the differ
ence in transport properties of the films.