Nonoptical characterization techniques for uncooled microbolometer infrared sensors

Infrared image sensors based on micromachined microbolometers can be integr ated with CMOS addressing, readout, and signal processing circuitry. Testin g of such sensors in the commercial environment must be rapid and cost effe ctive, hence, other diagnostic techniques are preferred to optical testing wherever possible. Accordingly, this paper presents nonoptical techniques f or characterising microbolometer-based IR sensors. From measurements of mic robolometer resistance, thermal conductivity, and temperature coefficient o f resistance, sensor fixed pattern noise and temperature response nonunifor mity are determined. These measurements also provide feedback on the fabric ation process parameters and defects.