Two stage modeling of ion mixing for impurity profiles of low concentrations

Authors
Kornich, GV Betz, G Bazhin, AI
Citation
Gv. Kornich et al., Two stage modeling of ion mixing for impurity profiles of low concentrations, IAN FIZ, 64(4), 2000, pp. 709-715
Citations number
32
Categorie Soggetti
Physics
Journal title
IZVESTIYA AKADEMII NAUK SERIYA FIZICHESKAYA
ISSN journal
03676765 → ACNP
Volume
64
Issue
4
Year of publication
2000
Pages
709 - 715
Database
ISI
SICI code
0367-6765(200004)64:4<709:TSMOIM>2.0.ZU;2-4