Features of impulse poly-energy ion implantation

Authors
Borisov, AM Krit, BL Tikhonov, SA Souminov, IV Sukharev, VG Kulikauskas, VS
Citation
Am. Borisov et al., Features of impulse poly-energy ion implantation, IAN FIZ, 64(4), 2000, pp. 737-740
Citations number
6
Categorie Soggetti
Physics
Journal title
IZVESTIYA AKADEMII NAUK SERIYA FIZICHESKAYA
ISSN journal
03676765 → ACNP
Volume
64
Issue
4
Year of publication
2000
Pages
737 - 740
Database
ISI
SICI code
0367-6765(200004)64:4<737:FOIPII>2.0.ZU;2-#