Sputtering of vanadium, molybdenum, and tantalum silicides by low energy Ar+ ions

Authors
Soshnikov, IP Murashov, S Shakhmin, AL Khodorkovsky, MA Bert, NA
Citation
Ip. Soshnikov et al., Sputtering of vanadium, molybdenum, and tantalum silicides by low energy Ar+ ions, IAN FIZ, 64(4), 2000, pp. 741-742
Citations number
4
Categorie Soggetti
Physics
Journal title
IZVESTIYA AKADEMII NAUK SERIYA FIZICHESKAYA
ISSN journal
03676765 → ACNP
Volume
64
Issue
4
Year of publication
2000
Pages
741 - 742
Database
ISI
SICI code
0367-6765(200004)64:4<741:SOVMAT>2.0.ZU;2-Y