Development of an X-ray photoemission electron microscopy system with multi-probes, and its application to surface imaging at static and dynamic states

We have developed a new X-ray photoemission electron microscopy system comb ined with low energy electron microscopy, photoemission electron microscopy , mirror electron microscopy (MEM), secondary electron emission microscopy (SEEM) and Auger electron emission microscopy, which provides multi-angle i nformation on the distribution and change of element, chemical state, struc ture, etc. at solid surfaces under the working conditions such as high temp erature and gas atmosphere. The performance of each microscopical method wa s examined and typical images are presented. The dynamic behaviour of fabri cated surfaces has been imaged in real time by SEEM and MEM.