Simultaneous extraction of the silicon film and front oxide thicknesses onfully depleted SOI nMOSFETs

This work presents a new method to extract the silicon film and front oxide thickness on fully depleted silicon-on-insulator nMOSFETs. The proposed me thod exploits the influence of the front/back gate voltages on the back/fro nt channel current regime. To extract the silicon film thickness, the drain current curve is measured as a function of the back gate voltage V-GB with the front interface inverted. When the back interface condition changes du e to the back gate voltage, kinks occur in the front drain current for spec ific V-GB biases and these are used by the method. Similarly, the back drai n current as a function of the front gate voltage V-GF With the back interf ace inverted shows some kinks at specific V-GF, which are used by the metho d to extract the front oxide thickness. MEDICI simulations were used to sup port the analysis and the method was validated experimentally. (C) 2000 Els evier Science Ltd. All rights reserved.