Two-dimensional simulation of an electron cyclotron resonance plasma source with self-consistent power deposition

Using a refined two-dimensional hybrid-model with self-consistent microwave absorption, we have investigated the change of plasma parameters such as p lasma density and ionization rate with the operating conditions. The depend ence of the ion current density and ion energy and angle distribution funct ion at the substrate surface vs. the radial position, pressure and microwav e power were discussed. Results of our simulation can be compared qualitati vely with many experimental measurements. (C) 2000 Published by Elsevier Sc ience B.V. All rights reserved.