Investigation on characteristics of IDBD plasma

An induced dielectric barrier discharge (IDBD) device is a new type of plas ma generator that has been developed in our laboratory. It can work in atmo spheric or vacuum conditions. This kind of machine is composed of a plate e lectrode covered by dielectric material, a web electrode, a metal substrate and a pulse power. Discharge occurs in the region between the medium and w eb electrode. At the same time, an induced plasma is formed in the region b etween the web electrode and the metal substrate. Some measurement methods have been used to test the macroscopical behaviors of induced plasma. The t esting results showed that: (1) the induced plasma was a stable and uniform plasma, and it could be obtained under atmospheric conditions; and (2) the thickness of the induced plasma was a function of the geometrical paramete rs of the device and discharge conditions. Some mathematical equations coul d be used to describe the establishment process and the thickness of the in duced plasma. (C) 2000 Elsevier Science B.V. All rights reserved.