The aim of the present work is to produce (TiAl)-based films and characteri
se them in the as-deposited state and after several heat-treatment cycles w
ith different holding times. The idea is to promote phase transformations o
f the films towards the intermetallic bulk materials. The structure and mec
hanical properties of binary films and films alloyed with silver were studi
ed as a function of several heat treatment holding times at 600 degreesC. T
he room temperature stresses were also evaluated and show that during annea
ling the stresses move from a compressive to a tensile state. The 18 h heat
treatment leads to a sharp hardening of the binary film thought as resulti
ng from a fine precipitation. After 162 h heat treatment the grain size inc
reases, but the intrinsic stresses compromise the ductility results obtaine
d. (C) 2000 Elsevier Science B.V. All rights reserved.